Modal dependence of dissipation in silicon nitride drum resonators

Approaching intrinsic performance in ultra-thin silicon nitride drum resonators

Understanding Dissipation in Nanostring Resonant Sensors

We have used optical drive and detection to study dissipation in silicon nitride beam resonators. We are able to tune resonant frequency as well as quality factor in a given nanostring resonator by several hundred percent by tuning the stress in real time, providing a unique look into the sources of dissipation for this class of nanoresonator. A record room temperature quality factor of 390,000...

Evidence of Surface Loss as Ubiquitous Limiting Damping Mechanism in SiN Micro- and Nanomechanical Resonators.

Silicon nitride (SiN) micro- and nanomechanical resonators have attracted a lot of attention in various research fields due to their exceptionally high quality factors (Qs). Despite their popularity, the origin of the limiting loss mechanisms in these structures has remained controversial. In this Letter we propose an analytical model combining acoustic radiation loss with intrinsic loss. The m...

Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides.

We introduce and present experimental evaluations of loss and nonlinear optical response in a waveguide and an optical resonator, both implemented with a silicon nitride/ silicon dioxide material platform prepared by plasma-enhanced chemical vapor deposition with dual frequency reactors that significantly reduce the stress and the consequent loss of the devices. We measure a relatively small lo...

On-chip nano-optomechanical whispering gallery resonators

This thesis work focuses on the design, fabrication and measurement of Gallium Arsenide (GaAs) nano-optomechanical disk resonators. These disks are both GHz frequency mechanical resonators, and high Q (> 10) optical whispering gallery mode resonators. By confining optical and mechanical energy on a sub-μm volume, they enable extremely large optomechanical coupling strengths (g0 >1 MHz). We pres...